Solution

Solution

Electronics / Chip Industry

Core requirements

High-cleanliness assurance in chip cleanrooms, precise temperature and humidity control for electronic component manufacturing, electrostatic protection, and treatment of hazardous process gases.

 

Dedicated technical adaptation

• Cleanroom Ventilation and Cleanliness Control The chip cleanroom employs a “laminar airflow + high-efficiency air filtration” system. In the Class 100 cleanroom, the supply air velocity is ≥0.45 m/s, and the air cleanliness level is ≤3,520 particles/m³. A differential pressure sensor is used to maintain positive pressure in the clean zone relative to the non-clean zone, thereby preventing external contaminated air from infiltrating. The ventilation system’s fans feature oil-free bearing designs, eliminating the risk of oil contamination in the air.

• Precise control of temperature, humidity, and static electricity The temperature in the surface-mount component assembly workshop is controlled at 23 ± 1℃, with humidity maintained between 45% and 55%. Real-time feedback from temperature and humidity sensors enables the central control system to automatically adjust the ratio of fresh air to recirculated air, ensuring that parameter fluctuations remain within ±0.5℃/±3%. The ventilation ducts and equipment are properly grounded, guaranteeing stable airflow and preventing static electricity from damaging electronic components.

• Process Gas Treatment The lithography and etching workshops are equipped with dedicated ventilation systems. For harmful gases such as photoresist volatiles and fluorides, a treatment process combining “chemical adsorption + high-efficiency filtration” is employed. The treated exhaust gases are discharged only after passing stringent emission standards. Each piece of process equipment is connected to an independent exhaust branch pipe, which is fitted with electric dampers. When a piece of equipment is shut down, the damper automatically closes, thereby reducing energy consumption.

Relevant Cases